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Safran

Safran MS1000L MEMS Capacitive Accelerometer

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Product Code: MS1000L
Condition: New
Weight: 1.00 KGS

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The MS1000L product is a cost-effective MEMS capacitive accelerometer based on a bulk micro-machined silicon element specifically designed for highest stability. The product is low power, fully calibrated, robust up to 6’000 g and extremely stable. The internal electronic circuit integrates a signal conditioning with a differential analog ±2.7V output, a built in self-test and a temperature sensor available for improving accuracy by thermal compensation. The sensor is self-contained and packaged in a 20-pin LCC ceramic housing, thus insuring a full hermeticity for harsh environments.

 

Key Parameter MS1002L MS1005L MS1010L MS1030L MS1050L MS1100L Unit
Full-Scale acceleration ±2 ±5 ±10 ±30 ±50 ±100 g
In run bias stability (@10s) 3 7.5 15 45 75 150 µg
Noise in band 7 17 34 102 170 340 µg/√Hz
Long-term Bias Repeatability 1.5 3.7 7.5 22 37 75 mg
Bias Temperature Coefficient 0.1 0.25 0.5 1.5 2.5 5 mg/°C
Scale Factor Sensitivity 1350 540 270 90 54 27 mV/g
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Details

The MS1000L product is a cost-effective MEMS capacitive accelerometer based on a bulk micro-machined silicon element specifically designed for highest stability. The product is low power, fully calibrated, robust up to 6’000 g and extremely stable. The internal electronic circuit integrates a signal conditioning with a differential analog ±2.7V output, a built in self-test and a temperature sensor available for improving accuracy by thermal compensation. The sensor is self-contained and packaged in a 20-pin LCC ceramic housing, thus insuring a full hermeticity for harsh environments.

 

Key Parameter MS1002L MS1005L MS1010L MS1030L MS1050L MS1100L Unit
Full-Scale acceleration ±2 ±5 ±10 ±30 ±50 ±100 g
In run bias stability (@10s) 3 7.5 15 45 75 150 µg
Noise in band 7 17 34 102 170 340 µg/√Hz
Long-term Bias Repeatability 1.5 3.7 7.5 22 37 75 mg
Bias Temperature Coefficient 0.1 0.25 0.5 1.5 2.5 5 mg/°C
Scale Factor Sensitivity 1350 540 270 90 54 27 mV/g
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