Safran
Safran MS1000L MEMS Capacitive Accelerometer
Request a quote at Contact@orbitalconnect.com or +1.888.218.9394
The MS1000L product is a cost-effective MEMS capacitive accelerometer based on a bulk micro-machined silicon element specifically designed for highest stability. The product is low power, fully calibrated, robust up to 6’000 g and extremely stable. The internal electronic circuit integrates a signal conditioning with a differential analog ±2.7V output, a built in self-test and a temperature sensor available for improving accuracy by thermal compensation. The sensor is self-contained and packaged in a 20-pin LCC ceramic housing, thus insuring a full hermeticity for harsh environments.
| Key Parameter | MS1002L | MS1005L | MS1010L | MS1030L | MS1050L | MS1100L | Unit |
| Full-Scale acceleration | ±2 | ±5 | ±10 | ±30 | ±50 | ±100 | g |
| In run bias stability (@10s) | 3 | 7.5 | 15 | 45 | 75 | 150 | µg |
| Noise in band | 7 | 17 | 34 | 102 | 170 | 340 | µg/√Hz |
| Long-term Bias Repeatability | 1.5 | 3.7 | 7.5 | 22 | 37 | 75 | mg |
| Bias Temperature Coefficient | 0.1 | 0.25 | 0.5 | 1.5 | 2.5 | 5 | mg/°C |
| Scale Factor Sensitivity | 1350 | 540 | 270 | 90 | 54 | 27 | mV/g |
The MS1000L product is a cost-effective MEMS capacitive accelerometer based on a bulk micro-machined silicon element specifically designed for highest stability. The product is low power, fully calibrated, robust up to 6’000 g and extremely stable. The internal electronic circuit integrates a signal conditioning with a differential analog ±2.7V output, a built in self-test and a temperature sensor available for improving accuracy by thermal compensation. The sensor is self-contained and packaged in a 20-pin LCC ceramic housing, thus insuring a full hermeticity for harsh environments.
| Key Parameter | MS1002L | MS1005L | MS1010L | MS1030L | MS1050L | MS1100L | Unit |
| Full-Scale acceleration | ±2 | ±5 | ±10 | ±30 | ±50 | ±100 | g |
| In run bias stability (@10s) | 3 | 7.5 | 15 | 45 | 75 | 150 | µg |
| Noise in band | 7 | 17 | 34 | 102 | 170 | 340 | µg/√Hz |
| Long-term Bias Repeatability | 1.5 | 3.7 | 7.5 | 22 | 37 | 75 | mg |
| Bias Temperature Coefficient | 0.1 | 0.25 | 0.5 | 1.5 | 2.5 | 5 | mg/°C |
| Scale Factor Sensitivity | 1350 | 540 | 270 | 90 | 54 | 27 | mV/g |